JPH064302Y2 - 金属ダイアフラム - Google Patents
金属ダイアフラムInfo
- Publication number
- JPH064302Y2 JPH064302Y2 JP15530288U JP15530288U JPH064302Y2 JP H064302 Y2 JPH064302 Y2 JP H064302Y2 JP 15530288 U JP15530288 U JP 15530288U JP 15530288 U JP15530288 U JP 15530288U JP H064302 Y2 JPH064302 Y2 JP H064302Y2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- electrode
- metal diaphragm
- electrodes
- trimming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 title claims description 36
- 229910052751 metal Inorganic materials 0.000 title claims description 36
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 46
- 238000009966 trimming Methods 0.000 claims description 46
- 230000002093 peripheral effect Effects 0.000 claims description 25
- 239000010931 gold Substances 0.000 description 23
- 229910052737 gold Inorganic materials 0.000 description 23
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000004904 shortening Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15530288U JPH064302Y2 (ja) | 1988-11-28 | 1988-11-28 | 金属ダイアフラム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15530288U JPH064302Y2 (ja) | 1988-11-28 | 1988-11-28 | 金属ダイアフラム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0275536U JPH0275536U (en]) | 1990-06-08 |
| JPH064302Y2 true JPH064302Y2 (ja) | 1994-02-02 |
Family
ID=31432811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15530288U Expired - Lifetime JPH064302Y2 (ja) | 1988-11-28 | 1988-11-28 | 金属ダイアフラム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064302Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002195901A (ja) * | 2000-12-27 | 2002-07-10 | Minebea Co Ltd | 高精度維持サニタリー用圧力変換器 |
-
1988
- 1988-11-28 JP JP15530288U patent/JPH064302Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0275536U (en]) | 1990-06-08 |
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